Application

11685383 · HEAT TREATING APPARATUS, HEAT TREATING METHOD, AND STORAGE MEDIUM

Filed 2007-03-13 · Granted · Patent 7527497 (2009-05-05) The official file ↗The patent and its PDF ↗ · Art unit 4137 · Examiner Robert E Thomas · CPC H10P 72/0458 · TOKYO ELECTRON LIMITED · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

22.4 mo

to disposition 25.8 mo

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.