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11749386 · SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

Filed 2007-05-16 · Granted · Patent 7380564 (2008-06-03) The official file ↗The patent and its PDF ↗ · Art unit 3753 · Examiner Ramesh Krishnamurthy · CPC G05D 7/0635 · BROOKS INSTRUMENT, LLC · LANDO & ANASTASI, LLP

Office actions
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first was Notice of allowance
RCEs
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no appeal
To first action
9.3 mo
to disposition 12.6 mo
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