PATLY.AIApplication
11869591 · EXAMINING A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER USING MACHINE LEARNING SYSTEMS
Filed 2007-10-09 · Granted · Patent 7453584 (2008-11-18) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Jonathan Skovholt · CPC G03F 7/70625 · TOKYO ELECTRON LIMITED · MORRISON & FOERSTER LLP
Office actions
0
first was Notice of allowance
RCEs
0
no appeal
To first action
9.0 mo
to disposition 13.3 mo
Statutes raised
·
0 actions read