Application

11903238 · POLARIMETRIC SCATTEROMETRY METHODS FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES

Filed 2007-09-21 · Granted · Patent 7471392 (2008-12-30) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Kara E Geisel Typical · CPC G01B 11/02 · STALLMAN & POLLOCK LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.5 mo

to disposition 15.3 mo

Statutes raised

102 103

1 actions read

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