Application

12008879 · OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES

Filed 2008-01-15 · Granted · Patent 7545483 (2009-06-09) The official file ↗The patent and its PDF ↗ · Art unit 2851 · Examiner Della J Rutledge · CPC G02B 27/0006 · CARL ZEISS SMT GMBH · Ohlandt, Greeley and Perle, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.0 mo

to disposition 16.8 mo

Statutes raised

102

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.