Application

12013007 · DETECTING THE PRESENCE OF A WORKPIECE RELATIVE TO A CARRIER HEAD

Filed 2008-01-11 · Abandoned The official file ↗ · Art unit 2121 · Examiner Maria N Von Buhr Typical · CPC B24B 37/0053 · NOVELLUS SYSTEMS, INC. · LKGlobal (NVLS)

Office actions

first was Non-final rejection

RCEs

appealed

To first action

23.4 mo

to disposition 39.7 mo

Statutes raised

102 112

1 actions read

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