Application

12052395 · ELECTROSTATIC CHUCK ASSEMBLY WITH CAPACITIVE SENSE FEATURE, AND RELATED OPERATING METHOD

Filed 2008-03-20 · Granted · Patent 7558045 (2009-07-07) The official file ↗The patent and its PDF ↗ · Art unit 2836 · Examiner Terrence Ronique Willoughby Typical · CPC H10P 72/722 · NOVELLUS SYSTEMS, INC. · LKGlobal (NVLS)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.1 mo

to disposition 15.6 mo

Statutes raised

102 103

1 actions read

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