Application

12068288 · LITHOGRAPHY SYSTEM, CONTROL SYSTEM AND DEVICE MANUFACTURING METHOD

Filed 2008-02-05 · Granted · Patent 7511797 (2009-03-31) The official file ↗The patent and its PDF ↗ · Art unit 2851 · Examiner Della J Rutledge · CPC G03F 7/70616 · ASML NETHERLANDS B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Ex parte Quayle

RCEs

no appeal

To first action

7.3 mo

to disposition 13.8 mo

Statutes raised

0 actions read

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