Application

12075631 · LPP EUV PLASMA SOURCE MATERIAL TARGET DELIVERY SYSTEM

Filed 2008-03-12 · Granted · Patent 7589337 (2009-09-15) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Meenakshi S Sahu Easy · CPC H05G 2/0027 · ASML NETHERLANDS B.V. · William C. Cray

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.3 mo

to disposition 18.1 mo

Statutes raised

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.