PATLY.AIApplication
12169737 · DEVICE AND METHOD FOR COMPENSATING A CAPACITIVE SENSOR MEASUREMENT FOR VARIATIONS CAUSED BY ENVIRONMENTAL CONDITIONS IN A SEMICONDUCTOR PROCESSING ENVIRONMENT
Filed 2008-07-09 · Abandoned The official file ↗ · Art unit 2858 · Examiner Jeff William Natalini Hard · CPC G01B 7/023 · CYBEROPTICS SEMICONDUCTOR, INC. · WESTMAN CHAMPLIN & KOEHLER, P.A.
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
30.6 mo
to disposition 36.8 mo
Statutes raised
103
1 actions read