Application
12178524 · METHOD AND SYSTEM FOR WAVEFRONT MEASUREMENTS OF AN OPTICAL SYSTEM
Filed 2008-07-23 · Granted · Patent 7768653 (2010-08-03) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Samuel A Turner Easy · CPC G03F 7/706 · ASML HOLDING N.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.
Office actions
3
first was Non-final rejection
RCEs
1
no appeal
To first action
8.7 mo
to disposition 24.3 mo
Statutes raised
102
3 actions read