Application

12210198 · APPARATUSES AND METHODS FOR CLEANING A SUBSTRATE

Filed 2008-09-14 · Granted · Patent 7625452 (2009-12-01) The official file ↗The patent and its PDF ↗ · Art unit 1792 · Examiner Stephen K Ko · CPC H10P 52/00 · PENILLA IP, APC and Lam Research Corp.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.6 mo

to disposition 14.6 mo

Statutes raised

102 103

1 actions read

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