Application

12246651 · SUBSTRATE PROCESSING APPARATUS

Filed 2008-10-07 · Abandoned The official file ↗ · Art unit 1792 · Examiner Stephen K Ko · CPC G03F 7/707 · Venable LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.6 mo

to disposition 15.8 mo

Statutes raised

103 112

1 actions read

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