Application

12290063 · APPARATUS AND METHOD FOR A COMBINED INTERFEROMETRIC AND IMAGE BASED GEOMETRIC DETERMINATION, PARTICULARLY IN THE MICROSYSTEM TECHNOLOGY

Filed 2008-10-27 · Granted · Patent 8072608 (2011-12-06) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Jonathon Cook Typical · CPC G01B 11/2441 · CARL MAHR HOLDING GMBH · Ronald S. Lombard

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

23.0 mo

to disposition 37.3 mo

Statutes raised

103 112

2 actions read

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