PATLY.AIApplication
12381643 · METHODS FOR PROCESSING A SUBSTRATE WITH A FLOW CONTROLLED MENISCUS
Filed 2009-03-13 · Granted · Patent 7862663 (2011-01-04) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Jason Mark Heckert Typical · CPC H10P 52/00 · PENILLA IP, APC and Lam Research Corp.
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
11.4 mo
to disposition 21.7 mo
Statutes raised
·
1 actions read