Application

12429017 · MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGRAPHICALLY PROCESSING SUBSTRATES

Filed 2009-04-23 · Granted · Patent 7821614 (2010-10-26) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Alan A Mathews Easy · CPC G03F 7/70058 · NOVA LTD. · FisherBroyles, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.5 mo

to disposition 18.1 mo

Statutes raised

102 103 DP

1 actions read

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