Application

12498976 · ELECTROSTATIC CHUCK ASSEMBLY WITH CAPACITIVE SENSE FEATURE, AND RELATED OPERATING METHOD

Filed 2009-07-07 · Abandoned The official file ↗ · Art unit 2836 · Examiner Terrence Ronique Willoughby Typical · CPC H10P 72/722 · LKGlobal (NVLS)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.8 mo

to disposition 21.4 mo

Statutes raised

101

1 actions read

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