Application

12620313 · COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM

Filed 2009-11-17 · Granted · Patent 7934880 (2011-05-03) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Alan A Mathews Easy · CPC H10P 72/0474 · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.5 mo

to disposition 17.5 mo

Statutes raised

101 DP

1 actions read

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