Application
12658902 · INTERFEROMETER STEP SCANNING SYSTEMS AND METHODS
Filed 2010-02-16 · Granted · Patent 8169616 (2012-05-01) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Samuel A Turner Easy · CPC G01J 3/4535 · AGILENT TECHNOLOGIES AUSTRALIA (M) PTY LTD · Agilent Technologies, Inc. (Varian acq)
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