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12699271 · VAPOR DEPOSITION PROCESSES FOR TANTALUM CARBIDE NITRIDE MATERIALS

Filed 2010-02-03 · Granted · Patent 7989339 (2011-08-02) The official file ↗The patent and its PDF ↗ · Art unit 1761 · Examiner Timothy S Chiang Typical · CPC C23C 16/36 · APPLIED MATERIALS, INC. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions
2
first was Non-final rejection
RCEs
0
appealed
To first action
1.3 mo
to disposition 17.9 mo
Statutes raised
102 103 DP
2 actions read
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