Application

12805852 · METHOD AND APPARATUS FOR ANGULAR-RESOLVED SPECTROSCOPIC LITHOGRAPHY CHARACTERIZATION

Filed 2010-08-20 · Granted · Patent 8054467 (2011-11-08) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Scott M Richey Typical · CPC H10P 76/204 · ASML NETHERLANDS B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

2.6 mo

to disposition 14.6 mo

Statutes raised

1 actions read

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