Application

12849978 · PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION

Filed 2010-08-04 · Granted · Patent 7948639 (2011-05-24) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Patrick J Connolly Easy · CPC G01B 9/02 · ZYGO CORPORATION · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.1 mo

to disposition 9.6 mo

Statutes raised

101

1 actions read

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