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12884967 · ELECTROSTATIC CHUCK WITH REDUCED ARCING

Filed 2010-09-17 · Granted · Patent 8270141 (2012-09-18) The official file ↗The patent and its PDF ↗ · Art unit 2836 · Examiner Patrick R Salce Typical · CPC H10P 72/722 · APPLIED MATERIALS, INC. · Moser Taboada / Applied Materials, Inc.

Office actions
0
first was Notice of allowance
RCEs
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no appeal
To first action
19.9 mo
to disposition 24.0 mo
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0 actions read
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