Application

13024190 · Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device

Filed 2011-02-09 · Abandoned The official file ↗ · Art unit 2877 · Examiner Michael A Lyons Easy · CPC G01B 9/02027 · VISTEC SEMICONDUCTOR SYSTEMS GMBH · Maria Eliseeva

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.9 mo

to disposition 19.7 mo

Statutes raised

101 102 103 112

1 actions read

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