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Application

13026356 · SURFACE-TREATED CERAMIC MEMBER, METHOD FOR PRODUCING THE SAME AND VACUUM PROCESSING APPARATUS

Filed 2011-02-14 · Granted · Patent 8231967 (2012-07-31) The official file ↗The patent and its PDF ↗ · Art unit 3991 · Examiner Ling X Xu Easy · CPC C04B 41/5035 · ULVAC, INC. · Bauer & Joseph

Office actions
2
first was Restriction requirement
RCEs
1
no appeal
To first action
4.2 mo
to disposition 17.5 mo
Statutes raised
102 112
2 actions read
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