Application
13027209 · MICRO-ELECTROMECHANICAL SYSTEM DEVICES
Filed 2011-02-14 · Granted · Patent 8319254 (2012-11-27) The official file ↗The patent and its PDF ↗ · Art unit 2896 · Examiner Wai Sing Louie Easy · CPC B81B 3/0008 · ROHM CO., LTD. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.
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