Application

13081394 · CATADIOPTRIC PROJECTION OBJECTIVE

Filed 2011-04-06 · Granted · Patent 8355201 (2013-01-15) The official file ↗The patent and its PDF ↗ · Art unit 2800 · Examiner Lee A Fineman Typical · CPC G02B 17/0816 · CARL ZEISS SMT GMBH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.2 mo

to disposition 21.4 mo

Statutes raised

102 103 DP

1 actions read

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