Application

13226087 · ETCH PROCESS FOR 3D FLASH STRUCTURES

Filed 2011-09-06 · Granted · Patent 8598040 (2013-12-03) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner David Y Kaufman Hard · CPC H10P 50/268 · LAM RESEARCH CORPORATION · Beyer Law Group LLP/Lam

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.0 mo

to disposition 26.9 mo

Statutes raised

103 112

2 actions read

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