Application

13229396 · METHOD FOR DETERMINING THE REGISTRATION OF A STRUCTURE ON A PHOTOMASK AND APPARATUS TO PERFORM THE METHOD

Filed 2011-09-09 · Granted · Patent 9303975 (2016-04-05) The official file ↗The patent and its PDF ↗ · Art unit 2665 · Examiner Nirav G Patel Typical · CPC G01B 11/26 · CARL ZEISS SMT GMBH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

18.5 mo

to disposition 54.9 mo

Statutes raised

102 103 112

6 actions read

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