Application

13288831 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER

Filed 2011-11-03 · Granted · Patent 9188880 (2015-11-17) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Chia How Michael Liu Hard · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

21.2 mo

to disposition 48.5 mo

Statutes raised

102 103 DP

4 actions read

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