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Application

13356252 · SUBSTRATE HOLDER

Filed 2012-01-23 · Granted · Patent 9421617 (2016-08-23) The official file ↗The patent and its PDF ↗ · Art unit 3722 · Examiner Eric Andrew Gates Typical · CPC B23B 31/142 · APPLIED NEXX, INC. · Tokyo Electron U.S. Holdings, Inc.

Office actions
3
first was Restriction requirement
RCEs
1
no appeal
To first action
38.6 mo
to disposition 55.0 mo
Statutes raised
102 103
2 actions read
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