PATLY.AIApplication
13395878 · METHOD AND APPARATUS FOR THE DETECTION OF ARC EVENTS DURING THE PLASMA PROCESSING OF A WAFER, SURFACE OF SUBSTRATE
Filed 2015-11-10 · Granted · Patent 9842726 (2017-12-12) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Roy M Punnoose Easy · CPC H10P 74/00 · VERITY INSTRUMENTS, INC. · PARKER JUSTISS, P.C.
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
16.8 mo
to disposition 25.1 mo
Statutes raised
102
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