Application

13410970 · METHOD OF DEPOSITING DIELECTRIC FILM BY MODIFIED PEALD METHOD

Filed 2012-03-02 · Granted · Patent 8415259 (2013-04-09) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Seahvosh J Nikmanesh Easy · CPC C23C 16/345 · ASM JAPAN K.K. · Snell & Wilmer (ASM IP Holding B.V.)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.3 mo

to disposition 13.2 mo

Statutes raised

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.