PATLY.AIApplication
13488343 · PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
Filed 2012-06-04 · Granted · Patent 9293356 (2016-03-22) The official file ↗The patent and its PDF ↗ · Art unit 3723 · Examiner Shantese L McDonald Typical · CPC H10P 72/3312 · APPLIED NEXX, INC. · Tokyo Electron U.S. Holdings, Inc.
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