Application

13549182 · U-MOS TRENCH PROFILE OPTIMIZATION AND ETCH DAMAGE REMOVAL USING MICROWAVES

Filed 2012-07-13 · Abandoned The official file ↗ · Art unit 2822 · Examiner Sophia T Nguyen Hard · CPC H10P 50/642 · SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC · onsemi (BHB)

Office actions

first was Final rejection

RCEs

no appeal

To first action

16.2 mo

to disposition 30.3 mo

Statutes raised

103 112

2 actions read

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