Application

13560155 · MODULAR SYSTEM AND PROCESS FOR CONTINUOUS DEPOSITION OF A THIN FILM LAYER ON A SUBSTRATE

Filed 2012-07-27 · Granted · Patent 8597430 (2013-12-03) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Angel Roman Easy · CPC C23C 14/568 · FIRST SOLAR, INC. · Dority & Manning, P.A. and Primestar Solar Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.4 mo

to disposition 16.2 mo

Statutes raised

102 103

1 actions read

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