Application

13567656 · METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND OPTICAL ELEMENT CLEANING DEVICE

Filed 2012-08-06 · Abandoned The official file ↗ · Art unit 1711 · Examiner Michael E Barr Hard · CPC H05G 2/0094 · GIGAPHOTON INC. · Gerald T. Shekleton

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.9 mo

to disposition 20.5 mo

Statutes raised

102

1 actions read

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