Application

13580933 · METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

Filed 2012-08-23 · Granted · Patent 8889533 (2014-11-18) The official file ↗The patent and its PDF ↗ · Art unit 2891 · Examiner Asok K Sarkar Easy · CPC C23C 16/45578 · KOKUSAI ELECTRIC CORPORATION · Volpe Koenig - HITACHI

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.4 mo

to disposition 26.8 mo

Statutes raised

1 actions read

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