Application

13597513 · SUBSTRATE COOLING DEVICE, SUBSTRATE COOLING METHOD AND HEAT TREATMENT APPARATUS

Filed 2012-08-29 · Abandoned The official file ↗ · Art unit 3749 · Examiner Anthony W Kandare Hard · CPC H10P 72/3312 · TOKYO ELECTRON LIMITED · Pearne & Gordon LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition 19.3 mo

Statutes raised

0 actions read

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