Application

13618472 · PLASMA TREATMENT APPARATUS, METHOD FOR FORMING FILM, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

Filed 2012-09-14 · Granted · Patent 8951894 (2015-02-10) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Stanetta D Isaac Typical · CPC H01J 37/3244 · Robinson Intellectual Property Law Office, P.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

7.8 mo

to disposition 28.9 mo

Statutes raised

103

1 actions read

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