Application

13633798 · METHOD FOR DEPOSITING TUNGSTEN FILM WITH LOW ROUGHNESS AND LOW RESISTIVITY

Filed 2012-10-02 · Granted · Patent 8853080 (2014-10-07) The official file ↗The patent and its PDF ↗ · Art unit 2896 · Examiner Cheung Lee Easy · CPC H10P 14/432 · NOVELLUS SYSTEMS, INC. · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

6.0 mo

to disposition 24.1 mo

Statutes raised

103

2 actions read

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