PATLY.AIApplication
13717812 · ETCHING APPARATUS
Filed 2012-12-18 · Granted · Patent 8986493 (2015-03-24) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Satish Chandra Hard · CPC H10P 50/642 · TOKYO ELECTRON LIMITED · ROTHWELL, FIGG, ERNST & MANBECK, P.C.
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
6.9 mo
to disposition 27.1 mo
Statutes raised
103
2 actions read