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13779682 · DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY

Filed 2013-02-27 · Abandoned The official file ↗ · Art unit 3723 · Examiner Arman Milanian Hard · CPC B24B 49/12 · Applied Materials, Inc. · FISH & RICHARDSON P.C. (APPLIED MATERIALS)

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
21.6 mo
to disposition 28.2 mo
Statutes raised
102
1 actions read
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