Application

13788790 · METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE AND ARRANGEMENT THEREFOR

Filed 2013-03-07 · Granted · Patent 8980009 (2015-03-17) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Saeed T Chaudhry Typical · CPC B08B 5/02 · ASML NETHERLANDS B.V. · WALTER OTTESEN, P.A.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

8.8 mo

to disposition 24.3 mo

Statutes raised

103

1 actions read

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