Application

13811894 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2013-07-18 · Granted · Patent 9507277 (2016-11-29) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Steven H Whitesell Typical · CPC G03F 7/70775 · TECHNISCHE UNIVERSITEIT EINDHOVEN · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

25.1 mo

to disposition 40.4 mo

Statutes raised

102 103 112

3 actions read

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