Application

13830217 · Technique for Repairing an EUV Photo-Mask

Filed 2013-03-14 · Granted · Patent 9494854 (2016-11-15) The official file ↗The patent and its PDF ↗ · Art unit 2851 · Examiner Brandon Bowers Typical · CPC G03F 1/72 · Dino Technology Acquisition LLC · Kwan & Olynick LLP -- KLA

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

27.0 mo

to disposition 44.1 mo

Statutes raised

101

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.