Application

13835317 · WAFER PLATEN THERMOSYPHON COOLING SYSTEM

Filed 2013-03-15 · Granted · Patent 9514916 (2016-12-06) The official file ↗The patent and its PDF ↗ · Art unit 3744 · Examiner Jose O Class-Quinones Typical · CPC H01J 37/3171 · VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. · KDW Firm PLLC - Varian/Applied Materials (85525)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

29.8 mo

to disposition 44.7 mo

Statutes raised

103 112

2 actions read

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