Application

13859618 · ARRANGEMENT OF RETICLE POSITIONING DEVICE FOR ACTINIC INSPECTION OF EUV RETICLES

Filed 2013-04-09 · Granted · Patent 8779635 (2014-07-15) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Johnnie L Smith Typical · CPC G01N 21/01 · KLA-TENCOR CORPORATION · KLA-Tencor Corporation and Simpson & Simpson PLLC

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

11.5 mo

to disposition 15.2 mo

Statutes raised

0 actions read

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