Application

13864701 · Reducing Registration Error of Front and Back Wafer Surfaces Utilizing a See-Through Calibration Wafer

Filed 2013-04-17 · Granted · Patent 9163928 (2015-10-20) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Willie C Merrell II Typical · CPC G01B 9/02072 · KLA-Tencor Corporation · KEVIN MCANDREWS

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.4 mo

to disposition 30.1 mo

Statutes raised

103 112

2 actions read

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