Application

13895093 · Method for Forming Fine Patterns of Semiconductor Device

Filed 2013-05-15 · Granted · Patent 8808971 (2014-08-19) The official file ↗The patent and its PDF ↗ · Art unit 1722 · Examiner Daborah Chacko Davis Typical · CPC H10P 76/4088 · HYNIX SEMICONDUCTOR INC. · MARSHALL, GERSTEIN & BORUN LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.5 mo

to disposition 15.1 mo

Statutes raised

2 actions read

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